A silicon wafer cassette and an equipment platform

The invention discloses a silicon wafer cassette and an equipment platform. The silicon wafer cassette is provided with a front door and an air valve connector. The equipment platform comprises a loading table for placing the silicon wafer cassette. The front end of a loading lock chamber is sealing...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	REN DAQING, DAI JUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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