A silicon wafer cassette and an equipment platform

The invention discloses a silicon wafer cassette and an equipment platform. The silicon wafer cassette is provided with a front door and an air valve connector. The equipment platform comprises a loading table for placing the silicon wafer cassette. The front end of a loading lock chamber is sealingly connected with the silicon wafer cassette through the front door, and the rear end is connected with the working platform through the rear door. The periphery of the working platform is connected with the process chamber, and a vacuum manipulator is arranged in the working platform for carrying the silicon wafer between the silicon wafer cassette and the process chamber. The silicon wafer cassette of the invention adopts a sealing structure, can bear a certain pressure, and can be vacuum-pumped or inflated by the equipment platform through an air valve connector, so that the silicon wafer cassette has strong preservation ability. The equipment platform can save the main cabinet of the loading module in the front