Mass spectrum ion source apparatus in low-vacuum condition

Mass spectrum ion source apparatus in low-vacuum condition

The invention belongs to the technical field of mass spectrum analysis test, and specifically relates to a mass spectrum ion source apparatus in a low-vacuum condition. The apparatus comprises a vacuum system, and an ion source, a sample platform, an ion transport system, an ion quality analyzer and...

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Hauptverfasser: FANG XIANG, DING HANGYU, TANG KEQI, DING CHUANFAN, XU FUXING, ZHOU MINGFEI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator FANG XIANG
DING HANGYU
TANG KEQI
DING CHUANFAN
XU FUXING
ZHOU MINGFEI
description The invention belongs to the technical field of mass spectrum analysis test, and specifically relates to a mass spectrum ion source apparatus in a low-vacuum condition. The apparatus comprises a vacuum system, and an ion source, a sample platform, an ion transport system, an ion quality analyzer and an ion detector arranged in the vacuum system; the vacuum system can realize a multi-stage vacuum differential function; ions generated by the ion source hit against the surface of a to-be-tested sample, and the to-be-tested sample suffers from sputtering and desorption after collision of ions to generate gas phase sample ions, so as to realize an ionization process of the to-be-tested sample; the generated to-be-tested sample ions enter the ion quality analyzer through the ion transport system; and by virtue of adoption of the vacuum system, the ion generation efficiency can be improved, and loss in the ion transport process can be lowered, thereby improving ion transmission efficiency anddetection sensitivity of
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Mass spectrum ion source apparatus in low-vacuum condition
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