Preparation method of super-junction semiconductor device

The invention discloses a preparation method of a super-junction semiconductor device. The preparation method comprises the steps of providing an N type substrate; preparing a super-junction structureon the N type substrate, and putting the super-junction structure into storage; and obtaining a pre-...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WANG RONGHUA, ZHONG SHENGRONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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