Production method for producing an electromechanical actuator and electromechanical actuator

Production method for producing an electromechanical actuator and electromechanical actuator

The invention relates to a production method for producing an electromechanical actuator (10), in which an electrical component (12) is provided, formed as a stack (14) of material layers (16) and electrode layers (18), and on the peripheral region (20) of which an insulation layer (30) is applied,...

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Hauptverfasser: KREISSIG UDO, LENK ANDREAS, MEINER ANDREAS, HAUBOLD JORG, HEINZE THOMAS
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Sprache:chi ; eng
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ELECTRICITY
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creator KREISSIG UDO
LENK ANDREAS
MEINER ANDREAS
HAUBOLD JORG
HEINZE THOMAS
description The invention relates to a production method for producing an electromechanical actuator (10), in which an electrical component (12) is provided, formed as a stack (14) of material layers (16) and electrode layers (18), and on the peripheral region (20) of which an insulation layer (30) is applied, wherein one electrode layer (18) in the component (12) is exposed by removing an insulation layer region (44), wherein a first removal rate (RI) for the insulation layer material (52) is selected to be significantly greater than a second removal rate (RW) for the material of the material layer (54),and wherein the second removal rate (RW) for the material of the material layer (54) is selected to be significantly greater than a third removal rate (RE) for the electrode layer material (56). Theinvention also relates to an electromechanical actuator (10) produced in particular using a production method of this type. 本发明涉及种用于制造机电执行器（10）的制造方法，其中提供被构造为由材料层（16）和电极层（18）构成的堆（14）的电器件（12），并且将绝缘层（30）涂覆到所述电器件的周向区域（20）上，其中在所述器件
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title Production method for producing an electromechanical actuator and electromechanical actuator
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