Quartz resonance sensitive chip
The invention discloses a quartz resonance sensitive chip comprising a resonance sensitive unit and fixing blocks, and also comprising a first flexible bridge, an isolation frame and second flexile bridges, wherein the first sensitive unit is arranged in the isolation frame, and connected with the f...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a quartz resonance sensitive chip comprising a resonance sensitive unit and fixing blocks, and also comprising a first flexible bridge, an isolation frame and second flexile bridges, wherein the first sensitive unit is arranged in the isolation frame, and connected with the first flexible bridge via the isolation frame, and the isolation frame is separately connected with the two fixing blocks via the two second flexible bridges.Compared with the prior art, through optimizing a vibration node position of the sensitive unit, the vibration node position of a detection modal is in a fixing block support structure position, and thus the dissipation of vibration energy is avoided; and compared with a manner of improving frequency stability, the quartz resonance sensitivechip provided by the invention does not have the problem that an optimization result is non-ideal due to fabrication errors, and is small in dissipation of vibration energy and high in frequency stability.
本发明公开了种石英谐振敏感芯片,包括 |
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