TRANSISTOR HAVING HIGH ELECTRON MOBILITY

TRANSISTOR HAVING HIGH ELECTRON MOBILITY

The invention relates to a method for producing a transistor (100, 200, 300, 400, 500, 600, 700) having high electron mobility, comprising a substrate (101, 201, 301, 401, 501, 601, 701) having a heterostructure (103, 203, 303, 403, 503, 603, 703), in particular an AlGaN/GaN heterostructure, compris...

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Hauptverfasser: JAUSS SIMON ALEXANDER, GRIEB MICHAEL, SCHWAIGER STEPHAN
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Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator JAUSS SIMON ALEXANDER
GRIEB MICHAEL
SCHWAIGER STEPHAN
description The invention relates to a method for producing a transistor (100, 200, 300, 400, 500, 600, 700) having high electron mobility, comprising a substrate (101, 201, 301, 401, 501, 601, 701) having a heterostructure (103, 203, 303, 403, 503, 603, 703), in particular an AlGaN/GaN heterostructure, comprising the steps: producing (8030) a gate electrode by structuring a semiconductor layer, which is applied to the heterostructure (103, 203, 303, 403, 503, 603, 703), wherein the semiconductor layer (104, 204, 304, 404, 504, 604, 704) in particular comprises polysilicon, applying (8040) a passivation layer (105, 205, 305, 405, 505, 605) to the semiconductor layer (104, 204, 304, 404, 504, 604, 704), forming (8070) drain regions and source regions, in that first vertical openings are produced, whichreach at least into the heterostructure (103, 203, 303, 403, 503, 603, 703), producing (8080) ohmic contacts in the drain regions and in the source regions by partial filling of the first vertical openings with a first metal
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title TRANSISTOR HAVING HIGH ELECTRON MOBILITY
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