A fluid supply device for glass synthesis

A fluid supply device for glass synthesis is provided which can inhibit tubing or flow control device degradation in situations that working air pressure of air type operating valves is lower than a proper range during power recover and the like for power failure and other abnormal situations. The f...

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Bibliographische Detailangaben
Hauptverfasser:	TOSHIMI HABASAKI, MITSURU TAKAGI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR FLUID-PRESSURE ACTUATORS FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MECHANICAL ENGINEERING SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	A fluid supply device for glass synthesis is provided which can inhibit tubing or flow control device degradation in situations that working air pressure of air type operating valves is lower than a proper range during power recover and the like for power failure and other abnormal situations. The fluid supply device is provided with a corrosive fluid supply line (L1) supplying a reaction container (11) with a corrosive fluid, and an MFC (15) disposed on the corrosive fluid supply line (L1). In a path of the corrosive fluid flowing through the MFC (15), the corrosive fluid supply line (L1) upstream the MFC (15) and the corrosive fluid supply line (L1) downstream the MFC (15) are respectively provided with air type operating valves (17a, 17c) operated through solenoid valves (16a, 16c). Theair type operating valves (17a, 17c) are normally closed. The working pressure of the air type operating valve (17c) disposed downstream the MFC (15) is higher than the working pressure of the air type operating valve (17a)