Developing device and developing method

The invention provides a developing device for developing and processing substrates. The developing device comprises a developing groove, a recycling tank and a conveying part, wherein the conveying part is arranged right above the developing groove and is used for conveying the substrates; the deve...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JIA DONGPO, WEI FAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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