Laser irradiation method and device

A plurality of parallel scanning lines are set in the x direction arranged with a scanning line gap Py in the y direction, the longitudinal direction of a linear laser spot (W) is oriented in the y direction, and laser light is irradiated on each irradiation position of width direction pitch [Lambda...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SATO RYOSUKE, INAMI TOSHIO, YAMASHITA YASUHIRO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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