Semiconductor Structure And Fabricating Method Thereof

A method of fabricating a semiconductor structure includes: forming a conductive layer on a first insulating layer; etching a portion of the conductive layer to expose a portion of the first insulating layer; deforming a surface of the portion of the first insulating layer to form a rough surface of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIU, KUOIO, HUANG, HSINIEH, CHEN, CHEN-SHIEN, WONG, JHENG-JIE, HUANG, WEI-LI, LIAO, DE-DUI MARVIN, HUANG, TSUNG-LUNG, SU, HSIANG-SHENG, KU, CHIN-YU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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