Apparatus and method for producing lateral HEMT

An apparatus (100, 200, 300, 400) including a lateral HEMT is provided. The lateral HEMT comprises at least one buffer layer (101, 201, 301, 401) on which another semiconductor layer (102, 202, 302, 402) is arranged. A first electrode (103, 203, 303, 403), a grid electrode (104, 204, 304, 404) and a...

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SCHWAIGER STEPHAN
description An apparatus (100, 200, 300, 400) including a lateral HEMT is provided. The lateral HEMT comprises at least one buffer layer (101, 201, 301, 401) on which another semiconductor layer (102, 202, 302, 402) is arranged. A first electrode (103, 203, 303, 403), a grid electrode (104, 204, 304, 404) and a second electrode (105, 205, 305, 140) are arranged on the second semiconductor layer (102, 202, 302, 402). The apparatus is characterized in that a first field plate (109, 209, 309, 409) is arranged below the buffer layer (101, 201, 301, 401), and the first field plate (109, 209, 309, 409) is at least partially abutted against the buffer layer (101, 201, 301, 401). 本发明提出种包括横向HEMT的装置(100、200、300、400),其中,所述横向HEMT包括至少个缓冲层(101、201、301、401),在该缓冲层上布置另半导体层(102、202、302、402),其中,在所述另半导体层(102、202、302、402)上布置第电极(103、203、303、403)、栅极(104、204、304、404)和第二电极(105、205、305、405),其特征在于,在所述缓冲层(101、201、301、401)下方布置第场板(109、209、309、409),其中,所述第场板(109、209、309、409)至少部分地邻接到所述缓冲层(101、201、301、401)上。
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Apparatus and method for producing lateral HEMT
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