Mask material for mask and method for manufacturing the same

The present invention realizes a mask substrate for a mask which exhibits both a collection efficiency based on a charging technique and a heating or thermal insulation function, and is excellent in workability. The filter substrate is formed by integrating a dense heat-insulating layer composed of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MASAMI TAKEUCHI, TAKUMA SHIRATAKE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
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