Photonically integrated chip, optical component having a photonically integrated chip, and method for the production thereof

The invention relates, inter alia, to a photonically integrated chip (2) having a substrate (20), a plurality of material layers arranged on a top side (21) of the substrate (20), an optical waveguide which is integrated in one or more wave-guiding material layers of the chip (2), and a grating coup...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: RICHTER HARALD H, SELICKE DAVID, HENNIGES MARVIN, ZIMMERMANN LARS, THEISS CHRISTOPH, MEISTER STEFAN, RHEE HANJO, STOLAREK DAVID
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates, inter alia, to a photonically integrated chip (2) having a substrate (20), a plurality of material layers arranged on a top side (21) of the substrate (20), an optical waveguide which is integrated in one or more wave-guiding material layers of the chip (2), and a grating coupler (60) which is formed in the optical waveguide and effects beam deflection of radiation guided in the waveguide in the direction out of the layer plane of the wave-guiding material layer(s) or effects beam deflection of radiation to be coupled into the waveguide in the direction into the layer plane of the wave-guiding material layer(s). With respect to the chip, the invention provides for an optical diffraction and refraction structure (100, 100a) which carries out beam forming of the radiation before being coupled into the waveguide or after being coupled out of the waveguide to be integrated in a material layer of the chip (2) above or below the optical grating coupler (60) or in a plurality of material layer