Method for predicting melt parameters

The present invention provides a method for predicting melt parameters. The method is suitable for use in a long crystal process. The method comprises the steps of collecting a plurality of melt height data at a plurality of original time points during a melting process of a previous long crystal pr...

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Bibliographische Detailangaben
Hauptverfasser: YANG CHENG JUI, SANG HUIMIN, HSU SUNG LIN, LIU YOUQUN, YANG YUMIN, YU WENHUAI, LUO QISHAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention provides a method for predicting melt parameters. The method is suitable for use in a long crystal process. The method comprises the steps of collecting a plurality of melt height data at a plurality of original time points during a melting process of a previous long crystal process, obtaining the melt height data for each melting stage, calculating melting speeds and melting time points of each melting stage, taking a plurality of melting speed relations corresponding to the melting stage and obtained through by linear regression analysis as a melting speed prediction model, and in the current melting process of the long crystal process, measuring the current melt height at the present point and predicting the predicted time point for achieving a desired melt height by using the selected the melting speed relation. 本发明提供种熔料参数的预测方法,适用于长晶工艺。预测方法包括下列步骤:在先前长晶工艺的熔化过程中,收集多个原始时间点的多笔熔料高度数据。取得每熔化阶段的熔料高度数据。分别计算每熔化阶段的多个熔速值以及多个熔速时间点。利用线性回归分析取得分别对应所述熔化阶段的多条熔速关系式以作为熔速预测模型。在目前长晶工艺的熔化过程中,在目前时间点测得目前熔料高度