Sub-wavelength grating based resonance enhanced ultraviolet light detector and preparation method thereof

The invention provides a sub-wavelength grating based resonance enhanced ultraviolet light detector and a preparation method thereof. The ultraviolet light detector includes a substrate, a sub-wavelength grating layer and an epitaxial layer. The epitaxial layer is provided with n-type contact electr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BAI CHENGLIN, WANG HUANHUAN, WANG QIUGUO, FANG WENJING, FAN XINYE, ZHANG XIA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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