Method for separating and recovering alkylene glycol monoalkyl ether, method for recycling liquid waste from processing of resist composition, and method for recycling resist composition processing liquid

The present invention provides a method for separating and recovering, with a high purity and at a high recovery rate, alkylene glycol monoalkyl ether from a solvent mixture containing: alkylene glycol monoalkyl ether; carboxylic acid ester corresponding thereto; and other solvents. By adding an alk...

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Bibliographische Detailangaben
Hauptverfasser:	OGATA FUJIMARO, MIKAWA YASUHIRO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SEPARATION TRANSPORTING
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