Nested circle fitting method and device for micro hole alignment

The invention discloses a nested circle fitting method and device for micro hole alignment. The method comprises the steps of: acquiring an initial image after a first hole and a second hole are preliminarily aligned, wherein the diameter of the first hole is smaller than that of the second hole; pr...

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Bibliographische Detailangaben
Hauptverfasser:	KONG QUANCUN, FAN XIAHUI, ZHAO SHUANGQI, LIU GUILI, LI DONG, LUO RONGKUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
Online-Zugang:	Volltext bestellen
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