All-optical switch and manufacture method thereof
The invention provides an all-optical switch and a manufacture method thereof; the all-optical switch comprises a lower silicon dioxide layer, as well as a first divider, a first waveguide, a second waveguide and a second divider formed on the silicon dioxide layer; the first waveguide and the secon...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides an all-optical switch and a manufacture method thereof; the all-optical switch comprises a lower silicon dioxide layer, as well as a first divider, a first waveguide, a second waveguide and a second divider formed on the silicon dioxide layer; the first waveguide and the second waveguide are arranged parallelly to form a parallel waveguide structure, the first divider and the second divider are connected respectively to the incident end and exiting end of the parallel waveguide structure, the silicon dioxide layer is provided with a window that opens up, and the second waveguide is partially suspended on the window. The manufacture method comprises: providing a substrate (comprising a lower silicon dioxide layer and an upper silicon structure layer); patterning the silicon structure layer to form first and second dividers and a parallel waveguide structure; patterning the silicon dioxide layer to form a window that opens up. All-optical switch is of parallel waveguide structure with one |
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