Manufacturing Method Of Glass Substrate And Manufacturing Apparatus Of Glass Substrate

The purpose of this invention is to provide a manufacturing method of a glass substrate that can reduce the impact to the environment and suppress surface contamination of the glass substrate, and a manufacturing apparatus of the glass substrate. An end face grinding device 20 is used to make the ch...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IKAI, OSAMU, KOBAYASHI, KENJI, SUZUKI, MUTSUKI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The purpose of this invention is to provide a manufacturing method of a glass substrate that can reduce the impact to the environment and suppress surface contamination of the glass substrate, and a manufacturing apparatus of the glass substrate. An end face grinding device 20 is used to make the chamfering grindstone 40 contact the end face 11a of the glass substrate 10, and make the chamfering grindstone 40 move relative to the glass substrate 10 so as to process the end face 11a. The end face grinding device 20 supplies water solution containing nonionic surfactant, i.e. coolant, to the contact part 13 between the chamfering grindstone 40 and the end face 11a in order to cool the contact part 13. The end face grinding device 20 turns the inner space 81 in the housing 30 of the chamfering grindstone 40 into negative pressure relative to the outer space 82, so that coolant is sucked from the inner space 81to inhibit the coolant from flowing to the outer space 82 and contaminating the glass substrate 10. In a