Device and method for determining concentration of vapor by means of oscillating body sensor

The invention relates to a device and to a method for determining the concentration of a vapor in a volume (2), in particular for determining or controlling the mass flow of the vapor being conveyed through the volume (2) by a carrier gas, wherein the volume (2) can be heated by means of a heating u...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: AL AHMAD NAEL, LONG MICHAEL, BECCARD BIRGIT IRMGARD, EICHLER ANDY, CREMER CLAUDIA, TRIMBORN KARL-HEINZ
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!