Substrate transporting stage, scribing apparatus and method for transporting substrate

The invention relates to a substrate transporting stage, a scribing apparatus including the same and a method for transporting a substrate preventing substrate damage on the state. The substrate transporting stage includes a state onto which the substrate is disposed and which rotates to transport t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, JIN RAK, HA, WAN YONG, CHOI, HAN HYOUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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