Optical measuring system

The present invention relates to an optical measuring technique, and more particularly, to an optical measuring system including a jig for holding a workpiece to be measured, an optical measuring apparatus and a grating ruler, wherein the optical lens of the optical measuring apparatus faces the wor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TANG YUNBING, PEI LAMEI, WANG XIAOWU
Format: Patent
Sprache:chi ; eng
Schlagworte:
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