Semiconductor device models including re-usable sub-structures

Methods and tools for generating measurement models of complex device structures based on re-useable, parametric models are presented. Metrology systems employing these models are configured to measure structural and material characteristics associated with different semiconductor fabrication proces...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ILORETA JONATHAN, ZHAO QIANG, LI LIEQUAN, KAACK TORSTEN, POSLAVSKY LEONID, LAFFIN MATTHEW A
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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