Low-friction nanometer TaC-reinforced carbon-based composite film preparation method
The invention discloses a low-friction nanometer TaC-reinforced carbon-based composite film preparation method. The preparation method comprises putting a graphite base into a chemical vapor deposition furnace, carrying out vacuum-pumping to pressure of 100pa or less, carrying out heating to a tempe...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a low-friction nanometer TaC-reinforced carbon-based composite film preparation method. The preparation method comprises putting a graphite base into a chemical vapor deposition furnace, carrying out vacuum-pumping to pressure of 100pa or less, carrying out heating to a temperature of 900-1200 DEG C, carrying out thermal insulation, feeding a TaC15-Ar-C3H6 reaction gas system for preparing C and TaC into a reactor through Ar as carrying gas according to a TaCl5 carrying gas Ar flowing amount of 0.04-0.40L/min and a propylene flowing amount of 0.2-1.2L/min, and depositing C and TaC on the surface of the graphite base to obtain a C-TaC composite multilayer film which comprises nanometer TaC crystal grains coated with pyrolytic carbon and has layer number of 3-20, a mass fraction of 5.0-25.0% and thickness of 6-30 microns. The nanometer composite multilayer structure has the advantages of high hardness, low friction coefficient, high wear resistance, high thermal conductivity, low |
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