Mechanical quantity measuring device and sensor unit

A mechanical quantity measuring device is provided with a sensor chip having a strain detector formed on a surface of a semiconductor substrate and a plurality of electrodes connected to the strain detector, a stem having a base that protrudes from an adjacent peripheral portion and has an upper sur...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yamaguchi Takuto, Oota Hiroyuki, Ashida Kisho, Miyajima Kentarou, Hio Masayuki, Shimokawa Hanae, Soma Atsuo, Kazama Atsushi, Hata Shohei, Onozuka Junji
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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