Ceramic capacitive pressure sensor and preparation method thereof
The invention discloses a ceramic capacitive pressure sensor and a preparation method thereof. The pressure sensor comprises a pedestal, the top side of the pedestal is provided with a pressure sensitive film, a planar electrode is arranged between the top side and the pressure sensitive film, the s...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses a ceramic capacitive pressure sensor and a preparation method thereof. The pressure sensor comprises a pedestal, the top side of the pedestal is provided with a pressure sensitive film, a planar electrode is arranged between the top side and the pressure sensitive film, the surface of the pressure sensitive film is provided with a conductive shielding layer and an insulated waterproof layer, the bottom side of the pedestal is provided with a conductive shielding layer, a groove or through hole is molded in the sidewall of the pedestal, the surface of the groove or through hole is provided with a conductive shielding layer and an insulated waterproof layer, and the conductive shielding layer at the surface of pressure sensitive film and the conductive shielding layer at the bottom side of the pedestal are communicated by the conductive shielding layer in the groove or through hole. The conductive shielding layers at the top side and the bottom side of the pedestal are connected with a g |
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