Composite shielding type piezoelectric film sensor
The invention provides a composite shielding type piezoelectric film sensor, which comprises an upper insulating layer, an upper metal layer, at least one composite electrode layer, a lower piezoelectric film layer, a lower metal layer and a lower insulating layer, wherein the above layers are succe...
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| creator | MENG ZHAOLONG |
| description | The invention provides a composite shielding type piezoelectric film sensor, which comprises an upper insulating layer, an upper metal layer, at least one composite electrode layer, a lower piezoelectric film layer, a lower metal layer and a lower insulating layer, wherein the above layers are successively arranged. Each composite electrode layer is composed of a piezoelectric film layer and a signal layer. The composite shielding type piezoelectric film sensor is characterized by being prepared by multiple piezoelectric film layers and metal layers, wherein N sets of columns can be formed as needed and a piezoelectric film with two signal outputs is realized. The above structure of the composite shielding type piezoelectric film sensor has the output capacity of N+1 layers of piezoelectric films. Compared with the signal output capacity of a single-layer piezoelectric film structure, the output capacity of the composite shielding type piezoelectric film sensor is increased by N+1 times. |
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Each composite electrode layer is composed of a piezoelectric film layer and a signal layer. The composite shielding type piezoelectric film sensor is characterized by being prepared by multiple piezoelectric film layers and metal layers, wherein N sets of columns can be formed as needed and a piezoelectric film with two signal outputs is realized. The above structure of the composite shielding type piezoelectric film sensor has the output capacity of N+1 layers of piezoelectric films. 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Each composite electrode layer is composed of a piezoelectric film layer and a signal layer. The composite shielding type piezoelectric film sensor is characterized by being prepared by multiple piezoelectric film layers and metal layers, wherein N sets of columns can be formed as needed and a piezoelectric film with two signal outputs is realized. The above structure of the composite shielding type piezoelectric film sensor has the output capacity of N+1 layers of piezoelectric films. 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Each composite electrode layer is composed of a piezoelectric film layer and a signal layer. The composite shielding type piezoelectric film sensor is characterized by being prepared by multiple piezoelectric film layers and metal layers, wherein N sets of columns can be formed as needed and a piezoelectric film with two signal outputs is realized. The above structure of the composite shielding type piezoelectric film sensor has the output capacity of N+1 layers of piezoelectric films. Compared with the signal output capacity of a single-layer piezoelectric film structure, the output capacity of the composite shielding type piezoelectric film sensor is increased by N+1 times.</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
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| subjects | ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS ELECTRICITY MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR PHYSICS TARIFF METERING APPARATUS TESTING |
| title | Composite shielding type piezoelectric film sensor |
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