Heterodyne interference measuring system convenient in splitting ratio adjustment

The invention provides a heterodyne interference measuring system convenient in splitting ratio adjustment. The heterodyne interference measuring system comprises a laser, a polarization splitting prism and a photoelectric detector. An acousto-optic frequency shifter is arranged in front of the lase...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAO XIAOKAI, LIU KAI, ZHAO YING, CHEN NAISHU
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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