Gradient micro-electro-mechanical systems (MEMS) microphone with varying height assemblies

In at least one embodiment, a micro-electro-mechanical systems (MEMS) microphone assembly is provided. The assembly comprises an enclosure, a single micro-electro-mechanical systems (MEMS) transducer, a substrate layer, and an application housing. The single MEMS transducer is positioned within the...

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Bibliographische Detailangaben
Hauptverfasser: JOHN BAUMHAUER, FENGYUAN LI, MARC REESE, SPIRO IRACLIANOS
Format: Patent
Sprache:eng
Schlagworte:
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