ELECTROSTATIC DISCHARGE PROTECTION DEVICES

The invention provides an electrostatic discharge protection device. The electrostatic discharge protection device comprises the components of a substrate which is provided with an active fin that extends in a first direction; a plurality of gate structures which extend in a second direction that is at a preset angle with the first direction and are partially covered by the active fin; an epitaxial layer which is arranged on the part between the gate structures on the active fin; an impurity area which is arranged below the epitaxial layer; and a contact plug which contacts with the epitaxial layer. In the first direction, the thickness of the central part of the impurity area is larger than the edge part of the impurity area. The contact plug is arranged at the central part of the impurity area.