Light-absorbing layer and layer system containing the layer, process for producing the layer system and sputter target suitable therefor
Light-absorbing layer systems are used for various applications, such as for solar-thermal applications or so-called ''black matrix'' layers in conjunction with liquid crystal displays. The layer or layers should accordingly exhibit a high absorption and low reflection in the vis...
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creator | WAGNER JENS LEE SUK-JAE SCHULTHEIS MARKUS KASTNER ALBERT KAHLE BEN SCHLOTT MARTIN |
description | Light-absorbing layer systems are used for various applications, such as for solar-thermal applications or so-called ''black matrix'' layers in conjunction with liquid crystal displays. The layer or layers should accordingly exhibit a high absorption and low reflection in the visible spectral range and they should be able to be etched without the formation of toxic substances and without particle residues while using simple dilute acids. In order to ensure this, it is proposed according to the invention that the absorber layer has an oxidic matrix, based on a base component K1 made of zinc oxide, tin oxide and/or indium oxide, and on an added component K3 which can replace the base component K1 up to a fraction of 75% by weight and which consists of niobium oxide, hafnium oxide, titanium oxide, tantalum oxide, vanadium oxide, yttrium oxide, zirconium oxide, aluminium oxide and mixtures thereof, where a blackening component K2 made of molybdenum, tungsten and alloys and mixtures thereof is distributed in the matrix and is present either as metal or as substoichiometric-oxidic compound of the metal in such a way that the layer material has a degree of reduction which is defined by an oxygen content of at most 65% of the stoichiometrically maximum oxygen content, and where the fraction ''x'' of the blackening component K2-calculated from the weight of its elemental fraction based on the weight of the layer material- is in the range between 20 and 50% by weight. |
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The layer or layers should accordingly exhibit a high absorption and low reflection in the visible spectral range and they should be able to be etched without the formation of toxic substances and without particle residues while using simple dilute acids. In order to ensure this, it is proposed according to the invention that the absorber layer has an oxidic matrix, based on a base component K1 made of zinc oxide, tin oxide and/or indium oxide, and on an added component K3 which can replace the base component K1 up to a fraction of 75% by weight and which consists of niobium oxide, hafnium oxide, titanium oxide, tantalum oxide, vanadium oxide, yttrium oxide, zirconium oxide, aluminium oxide and mixtures thereof, where a blackening component K2 made of molybdenum, tungsten and alloys and mixtures thereof is distributed in the matrix and is present either as metal or as substoichiometric-oxidic compound of the metal in such a way that the layer material has a degree of reduction which is defined by an oxygen content of at most 65% of the stoichiometrically maximum oxygen content, and where the fraction ''x'' of the blackening component K2-calculated from the weight of its elemental fraction based on the weight of the layer material- is in the range between 20 and 50% by weight.</description><language>eng</language><subject>BLASTING ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; HEATING ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; LIGHTING ; MECHANICAL ENGINEERING ; METALLURGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; RANGES ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; VENTILATING ; WEAPONS</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20151209&DB=EPODOC&CC=CN&NR=105143931A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20151209&DB=EPODOC&CC=CN&NR=105143931A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WAGNER JENS</creatorcontrib><creatorcontrib>LEE SUK-JAE</creatorcontrib><creatorcontrib>SCHULTHEIS MARKUS</creatorcontrib><creatorcontrib>KASTNER ALBERT</creatorcontrib><creatorcontrib>KAHLE BEN</creatorcontrib><creatorcontrib>SCHLOTT MARTIN</creatorcontrib><title>Light-absorbing layer and layer system containing the layer, process for producing the layer system and sputter target suitable therefor</title><description>Light-absorbing layer systems are used for various applications, such as for solar-thermal applications or so-called ''black matrix'' layers in conjunction with liquid crystal displays. The layer or layers should accordingly exhibit a high absorption and low reflection in the visible spectral range and they should be able to be etched without the formation of toxic substances and without particle residues while using simple dilute acids. In order to ensure this, it is proposed according to the invention that the absorber layer has an oxidic matrix, based on a base component K1 made of zinc oxide, tin oxide and/or indium oxide, and on an added component K3 which can replace the base component K1 up to a fraction of 75% by weight and which consists of niobium oxide, hafnium oxide, titanium oxide, tantalum oxide, vanadium oxide, yttrium oxide, zirconium oxide, aluminium oxide and mixtures thereof, where a blackening component K2 made of molybdenum, tungsten and alloys and mixtures thereof is distributed in the matrix and is present either as metal or as substoichiometric-oxidic compound of the metal in such a way that the layer material has a degree of reduction which is defined by an oxygen content of at most 65% of the stoichiometrically maximum oxygen content, and where the fraction ''x'' of the blackening component K2-calculated from the weight of its elemental fraction based on the weight of the layer material- is in the range between 20 and 50% by weight.</description><subject>BLASTING</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>HEATING</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>METALLURGY</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>RANGES</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>VENTILATING</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLEOwjAQQ7swIOAfwk4losDQEVUgBsTEXl3TaxqpJFHuOvQP-GwaUQY2Jlv2s5fZ62ZNxznU5GNtnRE9jBgFuGZ2NBLjU2jvGKxLBHf46XYiRK-RSLQ-Jt8M-gf4jtMbhYF5ihiiQRY0WIa6xwRHnPbrbNFCT7iZdZVtL-dHec0x-AopgEaHXJV3uT_KgyqUPKl_mDcmYUzk</recordid><startdate>20151209</startdate><enddate>20151209</enddate><creator>WAGNER JENS</creator><creator>LEE SUK-JAE</creator><creator>SCHULTHEIS MARKUS</creator><creator>KASTNER ALBERT</creator><creator>KAHLE BEN</creator><creator>SCHLOTT MARTIN</creator><scope>EVB</scope></search><sort><creationdate>20151209</creationdate><title>Light-absorbing layer and layer system containing the layer, process for producing the layer system and sputter target suitable therefor</title><author>WAGNER JENS ; LEE SUK-JAE ; SCHULTHEIS MARKUS ; KASTNER ALBERT ; KAHLE BEN ; SCHLOTT MARTIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN105143931A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>BLASTING</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>HEATING</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>METALLURGY</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>RANGES</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>VENTILATING</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>WAGNER JENS</creatorcontrib><creatorcontrib>LEE SUK-JAE</creatorcontrib><creatorcontrib>SCHULTHEIS MARKUS</creatorcontrib><creatorcontrib>KASTNER ALBERT</creatorcontrib><creatorcontrib>KAHLE BEN</creatorcontrib><creatorcontrib>SCHLOTT MARTIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WAGNER JENS</au><au>LEE SUK-JAE</au><au>SCHULTHEIS MARKUS</au><au>KASTNER ALBERT</au><au>KAHLE BEN</au><au>SCHLOTT MARTIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Light-absorbing layer and layer system containing the layer, process for producing the layer system and sputter target suitable therefor</title><date>2015-12-09</date><risdate>2015</risdate><abstract>Light-absorbing layer systems are used for various applications, such as for solar-thermal applications or so-called ''black matrix'' layers in conjunction with liquid crystal displays. The layer or layers should accordingly exhibit a high absorption and low reflection in the visible spectral range and they should be able to be etched without the formation of toxic substances and without particle residues while using simple dilute acids. In order to ensure this, it is proposed according to the invention that the absorber layer has an oxidic matrix, based on a base component K1 made of zinc oxide, tin oxide and/or indium oxide, and on an added component K3 which can replace the base component K1 up to a fraction of 75% by weight and which consists of niobium oxide, hafnium oxide, titanium oxide, tantalum oxide, vanadium oxide, yttrium oxide, zirconium oxide, aluminium oxide and mixtures thereof, where a blackening component K2 made of molybdenum, tungsten and alloys and mixtures thereof is distributed in the matrix and is present either as metal or as substoichiometric-oxidic compound of the metal in such a way that the layer material has a degree of reduction which is defined by an oxygen content of at most 65% of the stoichiometrically maximum oxygen content, and where the fraction ''x'' of the blackening component K2-calculated from the weight of its elemental fraction based on the weight of the layer material- is in the range between 20 and 50% by weight.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RANGES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION VENTILATING WEAPONS |
title | Light-absorbing layer and layer system containing the layer, process for producing the layer system and sputter target suitable therefor |
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