Capacitive pressure sensor and preparation method

The invention discloses a capacitive pressure sensor, including a SOI (Silicon-On-Insulator) silicon chip, a single crystalline silicon layer, a silicon dioxide layer and polysilicon layers. The SOI silicon chip is internally provided with a vacuum seal cavity. The silicon dioxide layer comprises wi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NIE MENG, HUANG QING'AN, BAO HONGQUAN
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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