MEMS-based rotation sensor for seismic applications and sensor units having same

The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate, and a proof mass coupled to the anchor via a plurality of flexural springs. T...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PROJETTI MAXIME, PAULSON HANS, VANCAUWENBERGHE OLIVIER, GOUJON NICOLAS
Format:	Patent
Sprache:	eng
Schlagworte:	DETECTING MASSES OR OBJECTS GEOPHYSICS GRAVITATIONAL MEASUREMENTS MEASURING PHYSICS TESTING
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