Method for measuring plane mirror absolute surface shape based on conjugate difference method

The invention discloses a method for measuring plane mirror absolute surface shape based on a conjugate difference method. The method comprises the following steps: a plane mirror to be measured and a standard plane mirror forming interference images on a CCD of an interferometer respectively, judgi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAI HUIJUAN, PAN LINKAI, GAO ZHISHAN, ZHU RIHONG, SUN WEIYUAN, MA JUN, LI JIANXIN
Format: Patent
Sprache:eng
Schlagworte:
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