Method for producing a dielectric and/or barrier layer or multilayer on a substrate, and device for implementing said method

The invention relates to a method for producing dielectric and/or barrier layers on a substrate, characterized in that it comprises the following steps: (a) cleaning substrates, (b) placing the substrate in a sample carrier and introducing same into a vacuum chamber, (c) dosing an inert gas and a re...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YUBERO VALENCIA FRANCISCO, RODRIGUEZ GONZALEZ-ELIPE AGUSTIN, SANCHEZ CORTEZON EMILIO, ESPINOS MANZORRO JUAN PEDRO, DELGADO SANCHEZ JOSE MARIA, GIL ROSTRA JORGE, RICO GAVIRA VICTOR
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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