Treating process for silicon tetrachloride

The invention provides a treating process for silicon tetrachloride. The process comprises the following steps: preheating, i.e., externally-supplied normal-temperature hydrogen enters a hydrogen preheater and exchanges heat with hydrogenated tail gas coming from a gas-to-gas heat exchanger; mixing,...

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1. Verfasser: QI LINXI
Format: Patent
Sprache:eng
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