Method for keeping 100-grade cleanness of optical element and packing equipment

The invention provides a method for keeping 100-grade cleanness of an optical element and packing equipment. The method for keeping 100-grade cleanness of the optical element comprises the following steps: firstly, the ultrasonic cleaning and drying are performed for maintaining the 100-grade cleann...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUANG JIN, YANG CUNBANG, ZHENG FANGLAN, YE LIN
Format: Patent
Sprache:eng
Schlagworte:
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