Image quality compensation mechanism used for photoetching equipment projection objective

The invention discloses a catadioptric objective image quality compensation mechanism used for photoetching equipment. The catadioptric objective image quality compensation mechanism is characterized in comprising an image quality compensation mechanism used for compensating projection image quality...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIANG RENCHENG, CAO CHANGZHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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