High-optical-subdivision grating interferometer based on plane mirrors

A high-optical-subdivision grating interferometer based on plane mirrors comprises a double-frequency orthogonal linear polarization laser light source, a polarization beam splitter, the first mirror, the second mirror, the third mirror, the fourth mirror, a first quarter wave plate, a second quarte...

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Bibliographische Detailangaben

Hauptverfasser:	ZHOU CHANGHE, LU YANCONG, WEI CHUNLONG, YU JUNJIE, LI SHUBIN, QIU JUCHENG, LI MINKANG, LI YANYANG
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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