LDMOS (Lateral Double-diffused Metal Oxide Semiconductor Field Effect Transistor) device and manufacturing method
The invention discloses an LDMOS (Lateral Double-diffused Metal Oxide Semiconductor Field Effect Transistor) device. An N-type injection layer formed by high-dose N-type impurity injection is additionally arranged in a drift region consisting of an N-type epitaxial layer; a P-type auxiliary depletio...
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