Solid rectification and purification device and method of solid MO source

The invention relates to a solid rectification and purification device and method of a solid MO source. A rectifying kettle is arranged in a rectification kettle heating system and is connected with a rectifying tower; a system cooling and refluxing ratio control system is mounted on the rectifying...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JI MINKUN, LU PING, XU CONGYING, CHEN HUABING, SHI JUNMIN, PAN XINGHUA, CAI YANQING, SUN XIANGZHEN, ZHANG LI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a solid rectification and purification device and method of a solid MO source. A rectifying kettle is arranged in a rectification kettle heating system and is connected with a rectifying tower; a system cooling and refluxing ratio control system is mounted on the rectifying tower in a connecting manner; a front cut fraction receiving tank is connected to a discharging tube by a front cut fraction receiving valve; a product desublimation receiving tank is connected with the discharging tube by a product receiving valve; the other end of the discharging tube is connected to the system cooling and refluxing ratio control system; when the rectification and purification is started, the front cut fraction receiving valve is opened, the product receiving valve is closed, low-boiling impurities are collected in the front cut fraction receiving tank; after the front cut fraction receiving is finished, the product receiving valve is opened, the front cut fraction receiving valve is closed, products are vaporized, desublimated and crystallized in the product desublimation receiving tank, nitrogen is fed into the front cut fraction receiving tank and the product desublimation receiving tank for buffer protection, the system is ensured to be oxygen-free and water-free, the product receiving valve is closed after finishing receiving, and the product desublimation receiving tank is removed, so that the receification and purification of the solid MO source is implemented.