Cleaning device of metal mask

The invention relates to the technical field of OLED, in particular to a cleaning device of a metal mask. The cleaning device comprises at least one cleaning tank, at least one separation tank and at least one filter, wherein each cleaning tank is filled with first chemical liquid for cleaning the m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUANG YOUYUAN, LI CHUNLIANG, LIN JIALONG, TAN SHIJIAN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of OLED, in particular to a cleaning device of a metal mask. The cleaning device comprises at least one cleaning tank, at least one separation tank and at least one filter, wherein each cleaning tank is filled with first chemical liquid for cleaning the metal mask, each separation tank is used for storing and regenerating second chemical liquid containing organic impurities after the cleaning of the metal mask, the liquid level of the second chemical liquid is higher than that of the first chemical liquid, each filter is disposed between the corresponding cleaning tank and the corresponding separation tank and used for allowing the second chemical liquid to restore the ability for cleaning the metal mask and to be regenerated into the first chemical liquid. The cleaning device has the advantages that the problems that existing direct draining type cleaning manners for OLED metal masks are poor in cleaning effect and long in cleaning cycle, the chemical liquid cannot be recycled, and the like are solved, the combination manners of the cleaning tanks and the separation tanks can be adjusted according process conditions and actual needs, continuous cleaning is guaranteed, and chemical liquid waste caused by direct draining is avoided while cleaning efficiency is increased.