Transfer robot having variable hand of four robot arms

The present invention relates to a transfer robot having four robot arms and, particularly, to a transfer robot having variable hands of four robot arms, which can individually drive the four robot arms and simultaneously perform loading and withdrawal of objects to be transferred (substrates or waf...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM MIN-HO, SEO MIN-SEOK, JUNG ILL-YOUNG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
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