Heating apparatus, heat treatment apparatus, and heating method

A heating apparatus, a heat treatment apparatus, and a heating method are provided. The heating apparatus includes a workpiece support on which a ring-shaped workpiece is placed, a rotary drive assembly, and a heater configured to heat the workpiece. The workpiece support includes a plurality of rot...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WATANABE HISAAKI, NAKATSU HITOSHI
Format: Patent
Sprache:eng
Schlagworte:
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