Pellicle

The purpose of the present invention is to provide a pellicle which has, on the inner surface of the pellicle frame, a pressure-sensitive adhesive layer that has holding performance capable of satisfactorily adhering suspended substances including dust thereto and that has excellent resistance to sh...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TSUMOTO TAKAMASA, KONDOU MASAHIRO
Format: Patent
Sprache:eng
Schlagworte:
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