Barrier coated nano structures

The present invention relates to a device comprising a nano-structure and a corresponding method of manufacturing, wherein said nano- structure is made of electrically conductive material and wherein said nano- structure is covered by a barrier coating comprising Ti, Zr, Hf, Nb, Ta, Mo, Sc, Y, Ge, L...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VAN DEN HEUVEL CORNELIUS ANTONIUS, WIMBERGER-FRIEDL REINHOLD, DE WITZ CHRISTIANNE ROSSETTE MARIA
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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