Barrier coated nano structures

The present invention relates to a device comprising a nano-structure and a corresponding method of manufacturing, wherein said nano- structure is made of electrically conductive material and wherein said nano- structure is covered by a barrier coating comprising Ti, Zr, Hf, Nb, Ta, Mo, Sc, Y, Ge, L...

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Hauptverfasser: VAN DEN HEUVEL CORNELIUS ANTONIUS, WIMBERGER-FRIEDL REINHOLD, DE WITZ CHRISTIANNE ROSSETTE MARIA
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creator VAN DEN HEUVEL CORNELIUS ANTONIUS
WIMBERGER-FRIEDL REINHOLD
DE WITZ CHRISTIANNE ROSSETTE MARIA
description The present invention relates to a device comprising a nano-structure and a corresponding method of manufacturing, wherein said nano- structure is made of electrically conductive material and wherein said nano- structure is covered by a barrier coating comprising Ti, Zr, Hf, Nb, Ta, Mo, Sc, Y, Ge, La, Ce, Pr, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb, Lu, Sr, Al, B, Ba, Bi, and/or Mg oxide in a thickness of at least about 1 nm, wherein said barrier coating is deposited by atomic layer deposition (ALD). The present invention also relates to a method of detecting a target compound in such a device, the use of such a device for surface specifically creating an evanescent field, measuring the dielectric properties of a medium, detecting the presence or the concentration of a target compound, determining the primary structure of a target compound, determining a deviation of the target compound from a control value, amplifying a target compound, or monitoring the amplification of a target compound.
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
MEASURING
NANOTECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
TESTING
TRANSPORTING
title Barrier coated nano structures
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