Optical trapping based method for in-situ calibration of displacement of piezoelectric platform

The invention provides an optical trapping based method for in-situ calibration of displacement of a piezoelectric platform. High-precision detection of motion displacement amplitude and frequency of the piezoelectric platform can be realized by analysis of position signals of Brownian motion of sta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LI DI, LI YINMEI, ZHOU JINHUA, ZHONG MINCHENG, WANG ZIQIANG
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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