Two-part retaining ring with interlock features

A retaining ring includes an annular lower portion and an annular upper portion. The annular lower portion has a main body with a bottom surface for contacting a polishing pad during polishing, an inner rim projecting upward from the main body, an outer rim projecting upward from the main body and s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ASWATHNARAYANAIAH RAVI, MEYER STACY, KLINGLER JAMES, GOPALAKRISHNAN PADMA, PAIK YOUNG J, BHATNAGAR ASHISH, PALATY ABRAHAM, RAHMATHULLAH IRFANULLA KHUDDUS, ICHETTIRA BOPANNA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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